Hoang Tung Do

Short description of my research


  • Formation and growth mechanism of molecules and small particles in plasma
  • Reactivity and catalytic reactions of small particles in plasmas
  • Influence of particles on plasma properties

Research fields, expertise

  • Formation of molecules and dust partices in Ar/CH4 and Ar/C2H2 rf plasma
  • Energy distribution of positive and negative ions.
  • Tunalbe diode laser absorption spectroscopy in discharges

Experiment, Methodes

  • Capacitively coupled rf discharge
  • Magnetron discharge
  • TDLAS (blue, red, infrared)
  • Plasma processing monitor


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