INSTITUTE OF PHYSICS, UNIVERSITY OF GREIFSWALDCHAIR OF EXPERIMENTAL PHYSICS: INTERFACE PHYSICSExperimentalphysik II - Grenzflächenphysik, Prof. Dr. Rainer Hippler |
Hoang Tung Do
Short description of my research
Motivation
- Formation and growth mechanism of molecules and small particles in plasma
- Reactivity and catalytic reactions of small particles in plasmas
- Influence of particles on plasma properties
Research fields, expertise
- Formation of molecules and dust partices in Ar/CH4 and Ar/C2H2 rf plasma
- Energy distribution of positive and negative ions.
- Tunalbe diode laser absorption spectroscopy in discharges
Experiment, Methodes
- Capacitively coupled rf discharge
- Magnetron discharge
- TDLAS (blue, red, infrared)
- Plasma processing monitor