2004

Journals

  1. Kuzmichev, A., Sidorenko, S., Steffen, H., Hippler, R., Kulikovsky, V.
    Investigations of a pulsed magnetron sputtering discharge with a vacuum pentode modulator power supply
    Vacuum 72, 59-69 (2004)

  2. Stranák, V., Tichý, M., Steffen, H., Wrehde, S., Hippler, R.
    Investigation of Plasma Parameters in the DC Planar Magnetron in Balanced and Unbalanced Mode
    Czech. J. Phys. 54, Suppl. C, 822 - 827 (2004)

  3. Matyash, K., Fröhlich, M., Kersten, H., Thieme, G., Schneider, R., Hannemann, M., Hippler, R.,
    Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source. Experiment and simulation
    J. Phys. D: Appl. Phys. 37, 2703 (2004)

  4. Trunec, D., Holik, M., Kudrna, P., Bilyk, O., Marek, A., Hippler, R., Tichý, M.,
    Monte Carlo simulations of the electron currents collected by electrostatic probes
    Contrib. Plasma Phys. 44, 577 (2004)

 

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